Spectroscopic ellipsometry of TaNx and VN films

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Bibliographic Details
Main Authors: MISTRIK, J, TAKAHASHI, K, THURGATE, S. M, RIESSEN, G. V, ANTOS, R, AOYAMA, M, YAMAGUCHI, T, ANMA, Y, FUKUDA, Y, TAKEYAMA, M. B, NOYA, A, JIANG, Z.-T
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric properties of solids and liquids
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Permittivity (dielectric function)
Physics
Polarimeters and ellipsometers
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ISSN:0040-6090
1879-2731