In situ spectroscopic ellipsometry of hydrogen-argon plasma cleaned silicon surfaces

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Bibliographic Details
Main Authors: FÖRSTER, Ch, SCHNABEL, F, WEIH, P, STAUDEN, Th, AMBACHER, O, PEZOLDT, J
Format: Conference Proceeding
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Optical instruments, equipment and techniques
Physics
Polarimeters and ellipsometers
Surface cleaning, etching, patterning
Surface treatments
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ISSN:0040-6090
1879-2731