Performance enhancement on sub-70nm strained silicon SOI MOSFETs on ultra-thin thermally mixed strained silicon/SiGe on insulator(TM-SGOI) substrate with raised S/D

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Bibliographic Details
Main Authors: LEE, B. H, MOCUTA, A, LAVOIE, C, MOCUTA, D, CHAKRAVARTI, A, MITCHELL, R. M, MEZZAPELLE, J, JAMIN, F, SENDELBACH, M, KERMEL, H, GRIBELYUK, M, DOMENICUCCI, A, BEDELL, S, JENKINS, K. A, NARASIMHA, S, KU, S. H, IEONG, M, YANG, I. Y, LEOBANDUNG, E, AGNELLO, P, HAENSCH, W, WELSER, J, CHEN, H, SADANA, D, RIM, K, O'NEIL, P, MO, R, CHAN, K, CABRAL, C
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
Online Access:Get full text
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