Performance enhancement on sub-70nm strained silicon SOI MOSFETs on ultra-thin thermally mixed strained silicon/SiGe on insulator(TM-SGOI) substrate with raised S/D

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Main Authors: LEE, B. H, MOCUTA, A, LAVOIE, C, MOCUTA, D, CHAKRAVARTI, A, MITCHELL, R. M, MEZZAPELLE, J, JAMIN, F, SENDELBACH, M, KERMEL, H, GRIBELYUK, M, DOMENICUCCI, A, BEDELL, S, JENKINS, K. A, NARASIMHA, S, KU, S. H, IEONG, M, YANG, I. Y, LEOBANDUNG, E, AGNELLO, P, HAENSCH, W, WELSER, J, CHEN, H, SADANA, D, RIM, K, O'NEIL, P, MO, R, CHAN, K, CABRAL, C
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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creator LEE, B. H
MOCUTA, A
LAVOIE, C
MOCUTA, D
CHAKRAVARTI, A
MITCHELL, R. M
MEZZAPELLE, J
JAMIN, F
SENDELBACH, M
KERMEL, H
GRIBELYUK, M
DOMENICUCCI, A
BEDELL, S
JENKINS, K. A
NARASIMHA, S
KU, S. H
IEONG, M
YANG, I. Y
LEOBANDUNG, E
AGNELLO, P
HAENSCH, W
WELSER, J
CHEN, H
SADANA, D
RIM, K
O'NEIL, P
MO, R
CHAN, K
CABRAL, C
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
title Performance enhancement on sub-70nm strained silicon SOI MOSFETs on ultra-thin thermally mixed strained silicon/SiGe on insulator(TM-SGOI) substrate with raised S/D
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