50nm: Gate all around (GAA): Silicon on nothing (SON): Devices: A simple way to co-integration of GAA transistors within bulk MOSFET process

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Bibliographic Details
Main Authors: MONFRAY, S, SKOTNICKI, T, HAOND, M, PALLA, R, LE FRIEC, Y, LEVERD, F, NIER, M.-E, VIZIOZ, C, LOUIS, D, MORAND, Y, DESCOMBES, S, CORONEL, P, MAZOYER, P, HARRISON, S, RIBOT, P, TALBOT, A, DUTARTRE, D
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
Online Access:Get full text
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DOI:10.1109/VLSIT.2002.1015411