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Influence of the field frequency on the nitrogen atom yield in the remote plasma of an N2 high frequency discharge

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Bibliographic Details
Published in:	Plasma sources science & technology 1998-11, Vol.7 (4), p.550-556
Main Authors:	MEREL, P, TABBAL, M, CHAKER, M, MOISAN, M, RICARD, A
Format:	Article
Language:	English
Subjects:	Electric discharges Electromagnetic waves (e.g., electron-cyclotron, whistler, bernstein, upper hybrid, lower hybrid) Electromagnetic waves (eg, electron-cyclotron, Whistler, Bernstein, upper hybrid, lower hybrid) Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Waves, oscillations, and instabilities in plasmas and intense beams
Online Access:	Get full text
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