Improved charge neutralization method for depth profiling of bulk insulators using O2+ primary beam on a magnetic sector SIMS instrument

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Bibliographic Details
Main Authors: PIVOVAROV, A. L, STEVIE, F. A, GRIFFIS, D. P
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Physics
Online Access:Get full text
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ISSN:0169-4332
1873-5584