Correlation between plasma chemistry, microstructure and electronic properties of Si:H thin films prepared with hydrogen dilution

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Bibliographic Details
Main Authors: CHAUDHURI, Partha, DAS, Debajyoti, PARTHA PRATIM RAY, NAMITA DUTTA GUPTA, ROY, Dhananjoy, LONGEAUD, Christophe
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport phenomena in thin films and low-dimensional structures
Exact sciences and technology
Photoconduction and photovoltaic effects
Photoconduction and photovoltaic effects
photodielectric effects
Physics
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ISSN:0022-3093
1873-4812