Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model: Special Issue on Dusty Plasmas

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Bibliographic Details
Published in:IEEE transactions on plasma science 2004, Vol.32 (2), p.691-698
Main Authors: DE BLEECKER, Kathleen, BOGAERTS, Annemie, GOEDHEER, Wim, GIJBELS, Renaat
Format: Article
Language:English
Subjects:
Basic studies of specific kinds of plasmas
Dusty or complex plasmas
plasma crystals
Exact sciences and technology
Magnetohydrodynamic and fluid equation
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma simulation
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ISSN:0093-3813
1939-9375