Morphology of macro-pores formed by electrochemical etching of p-type Si

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2004, Vol.14 (7), p.1022-1028
Main Authors: ASTROVA, E. V, BOROVINSKAYA, T. N, TKACHENKO, A. V, BALAKRISHNAN, S, PEROVA, T. S, RAFFERTY, A, GUN'KO, Y. K
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:0960-1317
1361-6439