Complex crater formation on silicon surfaces by low-energy Ar+n cluster ion implantation

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Bibliographic Details
Main Authors: POPOK, V. N, PRASALOVICH, S. V, CAMPBELL, E. E. B
Format: Conference Proceeding
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Physics
Online Access:Get full text
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ISSN:0039-6028
1879-2758