30-100-GHz inductors and transformers for millimeter-wave (Bi)CMOS integrated circuits

Silicon planar and three-dimensional inductors and transformers were designed and characterized on-wafer up to 100 GHz. Self-resonance frequencies (SRFs) beyond 100 GHz were obtained, demonstrating for the first time that spiral structures are suitable for applications such as 60-GHz wireless local...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2005-01, Vol.53 (1), p.123-133
Main Authors: Dickson, T.O., LaCroix, M.-A., Boret, S., Gloria, D., Beerkens, R., Voinigescu, S.P.
Format: Article
Language:English
Subjects:
Applied sciences
Automotive engineering
Circuit properties
Circuits
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Frequency
Inductors
Mathematical models
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
millimeter wave
Millimeter wave integrated circuits
Millimeter wave radar
Millimeter wave technology
mixer
self-resonance frequency (SRF)
Silicon
Silicon germanides
Spirals
stacked inductors
Transformers
voltage-controlled oscillator (VCO)
Wireless communication
Wireless LAN
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Summary:Silicon planar and three-dimensional inductors and transformers were designed and characterized on-wafer up to 100 GHz. Self-resonance frequencies (SRFs) beyond 100 GHz were obtained, demonstrating for the first time that spiral structures are suitable for applications such as 60-GHz wireless local area network and 77-GHz automotive RADAR. Minimizing area over substrate is critical to achieving high SRF. A stacked transformer is reported with S/sub 21/ of -2.5 dB at 50 GHz, and which offers improved performance and less area (30 /spl mu/m/spl times/30 /spl mu/m) than planar transformers or microstrip couplers. A compact inductor model is described, along with a methodology for extracting model parameters from simulated or measured y-parameters. Millimeter-wave SiGe BiCMOS mixer and voltage-controlled-oscillator circuits employing spiral inductors are presented with better or comparable performance to previously reported transmission-line-based circuits.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2004.839329