K-M-S (keep-molecules sputtering) deposition of optical MgF2thin films: Selected papers revised from the proceedings of the fourth international symposium on sputtering and plasma processes (ISSP'97)

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Bibliographic Details
Published in:Vacuum 1998, Vol.51 (4), p.559-564
Main Authors: KAWAMATA, K, SHOUZU, T, MITAMURA, N
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0042-207X
1879-2715