K-M-S (keep-molecules sputtering) deposition of optical MgF2thin films: Selected papers revised from the proceedings of the fourth international symposium on sputtering and plasma processes (ISSP'97)

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Published in:Vacuum 1998, Vol.51 (4), p.559-564
Main Authors: KAWAMATA, K, SHOUZU, T, MITAMURA, N
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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container_issue 4
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container_title Vacuum
container_volume 51
creator KAWAMATA, K
SHOUZU, T
MITAMURA, N
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ispartof Vacuum, 1998, Vol.51 (4), p.559-564
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1879-2715
language eng
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source ScienceDirect Freedom Collection
subjects Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title K-M-S (keep-molecules sputtering) deposition of optical MgF2thin films: Selected papers revised from the proceedings of the fourth international symposium on sputtering and plasma processes (ISSP'97)
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