Efeects of MESA etching processes on GaInP/GaAs triple barrier resonant tunneling diodes

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Bibliographic Details
Main Authors: SUHARA, M, ASAOKA, N, FUKUMITSU, M, HORIE, H, OKUMURA, T
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Diodes
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Molecular electronics, nanoelectronics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0161-6374
2576-1579