Advances in the process and in the methodology of emulsion optical masks construction

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Bibliographic Details
Main Authors: DE LARA, Daniel S, DE SARAIVA FERREIRA, Luiz Otavio, SWART, Jacobus W
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0161-6374
2576-1579