Power outflux from the plasma: an important parameter in surface processing

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Bibliographic Details
Published in:Plasma physics and controlled fusion 2004-12, Vol.46 (12B), p.B167-B177
Main Authors: Stoffels, E, Sladek, R E J, Kieft, I E, Kersten, H, Wiese, R
Format: Article
Language:English
Subjects:
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
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ISSN:0741-3335
1361-6587
DOI:10.1088/0741-3335/46/12B/015