Current status of failure analysis for ULSIs: Advances in submicron MOS devices and technology

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Bibliographic Details
Published in:Microelectronics and reliability 1998, Vol.38 (9), p.1369-1377
Main Authors: NAKAJIMA, S, UEKI, T, SHIONOYA, Y, MAFUNE, K, KUJI, N, NAKAMURA, S, KOMINE, Y, TAKEDA, T
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Testing, measurement, noise and reliability
Online Access:Get full text
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ISSN:0026-2714
1872-941X