Investigation of nitrided hafnium silicates for high-k dielectrics using photoelectron spectroscopy

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Bibliographic Details
Main Authors: MATHEW, Anoop, DEMIRKAN, Korhan, OPILA, R. L, WANG, Chang-Gong, MAES, Jan Willem, WILK, Glen
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Materials
Online Access:Get full text
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ISSN:0161-6374
2576-1579