Novel integration concepts for sige-based RF-MOSFETs

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Main Authors: ÖSTLING, Mikael, MALM, B. G, HELLSTRÖM, P.-E, RADAMSON, H. H, ISHEDEN, C, SEGER, J, VON HAARTMAN, M, ZHANG, S.-L
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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creator ÖSTLING, Mikael
MALM, B. G
HELLSTRÖM, P.-E
RADAMSON, H. H
ISHEDEN, C
SEGER, J
VON HAARTMAN, M
ZHANG, S.-L
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identifier ISSN: 0161-6374
ispartof Proceedings - Electrochemical Society, 2005, p.270-284
issn 0161-6374
2576-1579
language eng
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source IOPscience journals
subjects Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
title Novel integration concepts for sige-based RF-MOSFETs
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