Fully compliant tensural bistable micromechanisms (FTBM)

A new class of bistable mechanisms, the fully compliant tensural bistable micromechanism (FTBM) class, is introduced. The class consists of linear bistable micromechanisms that undergo tension loads, in addition to the bending loads present, through their range of motion. Proof-of-concept designs fa...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2005-12, Vol.14 (6), p.1223-1235
Main Authors: Wilcox, D.L., Howell, L.L.
Format: Article
Language:English
Subjects:
Applied sciences
Bending
Bistable mechanisms
compliant mechanisms
Design engineering
Design methodology
Displacement measurement
Exact sciences and technology
Finite element method
Finite element methods
Force measurement
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical analysis
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microactuators
Microelectromechanical systems
Micromachining
Micromechanical devices
Micromechanical devices and systems
on-chip actuation
Optimization methods
Physics
Precision engineering, watch making
Shutters
Testing
Thermomechanical processes
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Summary:A new class of bistable mechanisms, the fully compliant tensural bistable micromechanism (FTBM) class, is introduced. The class consists of linear bistable micromechanisms that undergo tension loads, in addition to the bending loads present, through their range of motion. Proof-of-concept designs fabricated in two different microelectromechanical systems (MEMS) surface micromachining processes were demonstrated. Three sets of refined designs within the FTBM class were designed using optimization methods linked with nonlinear finite element analysis (FEA), then fabricated and tested. Measured force and displacement performance are compared to values obtained by FEA. On-chip actuation of the bistable mechanisms was achieved using thermomechanical in-plane microactuators (TIMs). The FTBM class of bistable mechanisms explores a relatively new design space for fully compliant micromechanisms, and mechanisms from this class have promise in such applications as micro shutter positioning, microvalves, and electrical microrelays. [1448].
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2005.859089