Reaction products in light-induced microstructuring of Cu with Cl2

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Bibliographic Details
Main Authors: RAAF, H, SCHWENTNER, N
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Metals. Metallurgy
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0169-4332
1873-5584