Carbon nitride thin films deposited by nitrogen-ion-assisted KRF excimer ablation of graphite

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Bibliographic Details
Main Authors: LU YONG FENG, REN ZHONG MIN, NI HAI QIAO, HE ZI FENG, CHAN, D. S. H, LOW TECK SENG, CHEN SHAO YIN, GAMANI, K, CHENGENG, LI KUN
Format: Conference Proceeding
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Laser deposition
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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ISSN:0169-4332
1873-5584