On-chip high-Q Cu inductors embedded in wafer-level chip- scale package for silicon RF application

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Bibliographic Details
Main Authors: ITOI, Kazuhisa, SATO, Masakazu, ABE, Hiroshi, SUGAWARA, Hirotaka, ITO, Hiroyuki, OKADA, Kenichi, MASU, Kazuya, ITO, Tatsuya
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Magnetic devices
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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