A novel MEMS LTCC switch matrix

A novel planar 4/spl times/4 switch matrix using microelectromechanical system (MEMS) switches and low temperature cofired ceramic (LTCC) substrate is presented for the first time. Together a 9-layer LTCC substrate and 32 MEMS switches are integrated to create a non-blocking 4/spl times/4 switch mat...

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Bibliographic Details
Main Authors: Yassini, B., Choi, S., Zybura, A., Ming Yu, Mihailovich, R.E., DeNatale, J.F.
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Ceramics
Circuit properties
Design. Technologies. Operation analysis. Testing
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Integrated circuit interconnections
Integrated circuits
Micro- and nanoelectromechanical devices (mems/nems)
Microelectromechanical systems
Micromechanical devices
Microswitches
Predictive models
Radio frequency
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Switches
Switching, multiplexing, switched capacity circuits
Temperature
Transmission line matrix methods
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Description
Summary:A novel planar 4/spl times/4 switch matrix using microelectromechanical system (MEMS) switches and low temperature cofired ceramic (LTCC) substrate is presented for the first time. Together a 9-layer LTCC substrate and 32 MEMS switches are integrated to create a non-blocking 4/spl times/4 switch matrix functionality with excellent RF performance up to 7 GHz. An accurate model for predicting the interconnect circuit and switch matrix RF performance up to 20 GHz is also presented.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2004.1339060