Atomic layer deposition of Al2O3/ZnO nano-scale films for gold RF MEMS

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Bibliographic Details
Main Authors: DELRIO, F. W, HERRMANN, C. F, HOIVIK, N, GEORGE, S. M, BRIGHT, V. M, EBEL, J. L, STRAWSER, R. E, CORTEZ, R, LEEDY, K. D
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Micro- and nanoelectromechanical devices (mems/nems)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Switching, multiplexing, switched capacity circuits
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