Ion assisted deposition of titanium chromium nitride

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Bibliographic Details
Published in:Thin solid films 2006, Vol.497 (1-2), p.189-195
Main Authors: VISHNYAKOV, V. M, BACHURIN, V. I, MINNEBAEV, K. F, VALIZADEH, R, TEER, D. G, COLLIGON, J. S, VISHNVAKOV, V. V, YURASOVA, V. E
Format: Article
Language:Russian
Online Access:Get full text
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ISSN:0040-6090
1879-2731