Nitridation of porous GaAs by an ECR ammonia plasma

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Bibliographic Details
Published in:Plasma sources science & technology 2006-02, Vol.15 (1), p.33-36
Main Authors: Naddaf, M, Hullavarad, S S, Ganesan, V, Bhoraskar, S V
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma-based ion implantation and deposition
Surface hardening: nitridation, carburization, carbonitridation
Surface treatments
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/15/1/005