Two-photon 3D lithography: materials and applications

This study demonstrates the fabrication of a representative set of microstructures based on the three classes of two-photon photoactive materials compositions. Such structures can be used directly for suitable applications but can also be used as templates for the growth or molding of other material...

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Bibliographic Details
Main Authors: Kuebler, S.M.B., Braun, K.L., Stellacci, F., Bauer, C.A., Halik, M., Wenhui Zhou, Tianyue Yu, Ober, C.K., Marder, S.R., Perry, J.W.
Format: Conference Proceeding
Language:English
Subjects:
Absorption
Applied sciences
Chemistry
Electronics
Exact sciences and technology
Lithography
Materials science and technology
Microelectronic fabrication (materials and surfaces technology)
Microstructure
Optical device fabrication
Photochemistry
Polymers
Power generation
Resists
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:This study demonstrates the fabrication of a representative set of microstructures based on the three classes of two-photon photoactive materials compositions. Such structures can be used directly for suitable applications but can also be used as templates for the growth or molding of other materials as needed for a specific application. Given the ability of the two-photon lithography to produce 3D patterns of arbitrary structure, there is potential for the fabrication of an essentially limitless number of micro- and nano-structures in a wide variety of materials compositions.
DOI:10.1109/LEOS.2004.1363362