Characteristics improvement and carrier transportation of CeO2 gate dielectrics with rapid thermal annealing

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Main Authors: CHYI WANG, Jer, KUO CHENG CHIANG, TAN FU LEI, CHUNG LEN LEE
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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creator CHYI WANG, Jer
KUO CHENG CHIANG
TAN FU LEI
CHUNG LEN LEE
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title Characteristics improvement and carrier transportation of CeO2 gate dielectrics with rapid thermal annealing
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