Fabrication comb-drive device by MEMS and electroplating

A micro actuator as an electrostatic comb driver fabricated by MEMS surface micromachining technique and electroplating technique will be presented in this paper. The electroplating technique is applied to deposit nickel as the structure layer that is instead of the conventional polysilicon structur...

Full description

Saved in:
Bibliographic Details
Main Authors: CHIEN, Chao-Heng, CHEN, Shi-Hao
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Capacitance
Capacitors
Chemical sensors
Computer science
control theory
systems
Control theory. Systems
Electromechanical sensors
Electronics
Electrostatics
Exact sciences and technology
Fabrication
Intelligent sensors
Micro- and nanoelectromechanical devices (mems/nems)
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices
Nickel
Optical sensors
Robotics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A micro actuator as an electrostatic comb driver fabricated by MEMS surface micromachining technique and electroplating technique will be presented in this paper. The electroplating technique is applied to deposit nickel as the structure layer that is instead of the conventional polysilicon structure layer deposited by CVD technique. Using electroplated nickel instead of CVD-polysilicon, the fabrication process involves low-temperature electro-plating process; therefore, it is well suited for the post-IC process.
DOI:10.1109/DTIP.2003.1287069