Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2006-04, Vol.16 (4), p.862-868
Main Authors: Fernández, L J, Berenschot, E, Wiegerink, R J, Flokstra, J, Jansen, H V, Elwenspoek, M
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/16/4/024