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Magnetic induction microwachine. Part II: Fabrication and testing
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Published in: | Journal of microelectromechanical systems 2006, Vol.15 (2), p.427-439 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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ISSN: | 1057-7157 1941-0158 |