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Magnetic induction microwachine. Part II: Fabrication and testing

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2006, Vol.15 (2), p.427-439
Main Authors: CROS, Florent, KOSER, Hur, ALLEN, Mark G, LANG, Jeffrey H
Format: Article
Language:English
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ISSN:1057-7157
1941-0158