Magnetic induction microwachine. Part II: Fabrication and testing

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Published in:Journal of microelectromechanical systems 2006, Vol.15 (2), p.427-439
Main Authors: CROS, Florent, KOSER, Hur, ALLEN, Mark G, LANG, Jeffrey H
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
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container_end_page 439
container_issue 2
container_start_page 427
container_title Journal of microelectromechanical systems
container_volume 15
creator CROS, Florent
KOSER, Hur
ALLEN, Mark G
LANG, Jeffrey H
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ispartof Journal of microelectromechanical systems, 2006, Vol.15 (2), p.427-439
issn 1057-7157
1941-0158
language eng
recordid cdi_pascalfrancis_primary_17682863
source IEEE Xplore (Online service)
subjects Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
title Magnetic induction microwachine. Part II: Fabrication and testing
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