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A quick method for AlCu interconnect electromigration performance predicting and monitoring

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Bibliographic Details
Published in:	Semiconductor science and technology 2006-05, Vol.21 (5), p.633-637
Main Authors:	Zhang, Wenjie, Yi, Leeward, Tao, Kai, Ma, Yue, Chang, Pingyi, Mao, Duli, Wu, Jin, Zou, S C
Format:	Article
Language:	English
Subjects:	Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology General (including economical and industrial fields) Integrated circuits Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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