A microwave plasma torch and its applications

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Bibliographic Details
Published in:Plasma sources science & technology 2006-05, Vol.15 (2), p.S26-S34
Main Authors: Uhm, H S, Hong, Y C, Shin, D H
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Etching and cleaning
Exact sciences and technology
Materials science
Methods of nanofabrication
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma applications
Plasma devices
Plasma torches
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/15/2/S04