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Development of photo-pattemable organo-mineral hybrid films from the sol-gel condensation of alkoxysilanes
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Published in: | Thin solid films 2006, Vol.510 (1-2), p.334-338 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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ISSN: | 0040-6090 1879-2731 |