Molybdenum-gate HfO2 CMOS FinFET technology

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Bibliographic Details
Main Authors: HA, Daewon, TAKEUCHI, H, CHOI, Y.-K, KING, T.-J, BAI, W. P, KWONG, D.-L, AGALWAL, A, AMEEN, M
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
Online Access:Get full text
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