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Damp heat stability and annealing behavior of aluminum doped zinc oxide films prepared by magnetron sputtering

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Bibliographic Details
Main Authors: TOHSOPHON, T, HÜPKES, J, CALNAN, S, REETZ, W, RECH, B, BEYER, W, SIRIKULRAT, N
Format: Conference Proceeding
Language:English
Subjects:
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ISSN:0040-6090
1879-2731