ZrO2 film growth by chemical vapor deposition using zirconium tetra-tert-butoxide

Saved in:
Bibliographic Details
Published in:Thin solid films 1999-07, Vol.348 (1-2), p.90-98
Main Authors: CAMERON, M. A, GEORGE, S. M
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(99)00022-X