Low power integrated pressure sensor system for medical applications: Special Issue of the Micromechanics Section of Sensors and Actuators, based on contributions revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-98), Heidelberg, Germany, 25-29 January 1998

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1999, Vol.73 (1-2), p.58-67
Main Authors: HIEROLD, C, CLASBRUMMEL, B, BEHREND, D, SCHEITER, T, STEGER, M, OPPERMANN, K, KAPELS, H, LANDGRAF, E, WENZEL, D, ETZRODT, D
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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ISSN:0924-4247
1873-3069