Secondary ion statistics and determination of nanocluster (m > 107 amu) ion registration efficiency

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Bibliographic Details
Main Authors: NOVIKOV, A. V, KIRILLOV, S. N, BARANOV, I. A, OBNORSKII, V. V, YARMIYCHUK, S. V
Format: Conference Proceeding
Language:Russian
Online Access:Get full text
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ISSN:0169-4332
1873-5584