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Monolithically integrated enhancement/depletion-mode AlGaN/GaN HEMT inverters and ring oscillators using CF4 plasma treatment

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Bibliographic Details
Published in:IEEE transactions on electron devices 2006-09, Vol.53 (9), p.2223-2230
Main Authors: YONG CAI, ZHIQUN CHENG, TANG, Wilson Chak Wah, KEI MAY LAU, CHEN, Kevin J
Format: Article
Language:English
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ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2005.881002