Development of two-dimensional scanning probe arrays for dip pen nanolithography (DPN)

In this paper, we report the development of two-dimensional scanning probe arrays to achieve high-throughput DPN writing in a parallel mode. A new "mold-and-transfer" micromachining process has been developed, which is capable of making large scanning probe arrays with high yield and at lo...

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Bibliographic Details
Main Authors: Zou, Jun, Wang, Xuefeng, Bullen, David, Liu, Chang, Mirkin, Chad
Format: Conference Proceeding
Language:English
Subjects:
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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Summary:In this paper, we report the development of two-dimensional scanning probe arrays to achieve high-throughput DPN writing in a parallel mode. A new "mold-and-transfer" micromachining process has been developed, which is capable of making large scanning probe arrays with high yield and at low cost. Up to date, two-dimensional passive probe arrays with 1000 metal probes and 1000,000 polymer probes have been successfully developed. Prototypes of two-dimensional active probe arrays have also been successfully fabricated and tested, which consists of 49 scanning probe individually controlled by a thermal bimorph micro actuator integrated on each probe. To ensure proper contact status of each probe on the sample surface, a new electrical probe-substrate contact sensing method has also been developed for two-dimensional DPN probe arrays to realize robust DPN writing. As such, 2D DPN writing has been successfully demonstrated for the first time.
ISSN:0277-786X
DOI:10.1117/12.666389