Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications

Microfabricated cantilevers are widely used for biomedical sensing applications. In this paper, for the first time, design guidelines have been provided for composite polymeric microcantilevers with embedded piezoresistors. Optimization guidelines have been provided from the point of reducing their...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2006-12, Vol.15 (6), p.1789-1794
Main Authors: Kale, N.S., Rao, V.R.
Format: Article
Language:English
Subjects:
Affinity cantilevers
antibody immobilization
bioMEMS
Capacitive sensors
Chemical vapor deposition
Deflection
Design engineering
Detection
Exact sciences and technology
Fabrication
Guidelines
hotwire CVD
Immune system
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Markers
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
neutral axis
Physics
Piezoresistance
Piezoresistive devices
Piezoresistors
polymeric cantilevers
Polymers
Stiffness
Stress
Stresses
Surface resistance
surface stress
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Summary:Microfabricated cantilevers are widely used for biomedical sensing applications. In this paper, for the first time, design guidelines have been provided for composite polymeric microcantilevers with embedded piezoresistors. Optimization guidelines have been provided from the point of reducing their stiffness and to increase their deflection and the DeltaR/R response. Choice of the piezoresistive material and the location of this layer with respect to the neutral axis are shown to impact the stiffness and DeltaR/R of a microcantilever. Differences in the behavior of DeltaR/R and deflection, when surface stresses are applied to polymer based microcantilevers and oxide/nitride based ones, are brought out. We also show that it is essential to have the immobilization layer and the piezoresistor on the same side of the neutral axis particularly when these microcantivelers are used for sensing small surface stresses in the order of a few mN/m, typical of many molecular markers used in biomedical applications
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2006.886031