Second harmonic generation for noninvasive metrology of silicon-on-insulator wafers : The advanced semiconductor manufacturing conference

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2007, Vol.20 (2), p.107-113
Main Authors: ALLES, Michael L, PASTERNAK, Robert, XIONG LU, TOLK, Norman H, SCHRIMPF, Ronald D, FLEETWOOD, Daniel M, DOLAN, Robert P, STANDLEY, Robert W
Format: Article
Language:English
Subjects:
Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0894-6507
1558-2345