Investigation of Magnetostrictive Microdevices

This paper presents a method to model magnetostrictively activated surface acoustic wave devices with a commercially available finite element analysis package. Flexural and surface wave modes were identified by simulation of the frequency response. Devices with parallel strip electrodes were fabrica...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2007-06, Vol.43 (6), p.2722-2724
Main Authors: Scheerschmidt, G., Kirk, K.J., McRobbie, G.
Format: Article
Language:English
Subjects:
Acoustic waves
Applied sciences
Cross-disciplinary physics: materials science
rheology
Devices
Electrodes
Exact sciences and technology
Finite element methods
Finite-element analysis
Frequency response
Joining, thermal cutting: metallurgical aspects
lamb waves
MAGMEMS
Magnetic analysis
Magnetic devices
Magnetism
Magnetostriction
Magnetostrictive devices
magnetostrictive thin film
Materials science
Mathematical models
Measurement methods
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Networks
Other topics in materials science
Packaging
Physics
Resonant frequencies
Resonant frequency
Surface acoustic wave devices
surface acoustic waves (SAW)
Surface waves
Welding
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Description
Summary:This paper presents a method to model magnetostrictively activated surface acoustic wave devices with a commercially available finite element analysis package. Flexural and surface wave modes were identified by simulation of the frequency response. Devices with parallel strip electrodes were fabricated. The device performance was experimentally determined by two different measurement methods. The surface displacement was monitored via laser vibrometry and the impedance measured using a network analyzer. Both procedures showed resonances at similar frequencies. In addition, the surface modes excited in the real devices agree with the resonant frequencies found from the model
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2007.892642