Nanoinjection Lithography for Submicrometer Electrodes on Polymer Substrates

In this paper, a high-throughput method for fabricating submicrometer electrodes on polymer substrates is introduced and results are presented. This new process, known as nanoinjection lithography, combines nanoinjection molding with trench-filling techniques to create submicrometer electrodes on th...

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Bibliographic Details
Published in:IEEE transactions on nanotechnology 2007-07, Vol.6 (4), p.460-464
Main Authors: Rust, M.J., Do, J., Se Hwan Lee, Ahn, C.H.
Format: Article
Language:English
Subjects:
Amperometric sensors
Applied sciences
Atomic force microscopy
Biochip
Biological and medical sciences
Biomedical electrodes
Biosensors
Biotechnology
Chip formation
Electrodes
Electronics
Exact sciences and technology
Fabrication
Fundamental and applied biological sciences. Psychology
Lithography
Methods. Procedures. Technologies
Microelectronic fabrication (materials and surfaces technology)
Miscellaneous
Molecular biophysics
nanobiosensors
Nanocomposites
nanoelectrodes
nanoinjection lithography
Nanomaterials
Nanostructure
Nanotechnology
Others
point-of-care testing
polymer nanofabrication
Polymers
Scanning electron microscopy
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surgical implants
Testing
Various methods and equipments
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Description
Summary:In this paper, a high-throughput method for fabricating submicrometer electrodes on polymer substrates is introduced and results are presented. This new process, known as nanoinjection lithography, combines nanoinjection molding with trench-filling techniques to create submicrometer electrodes on thermoplastic polymers. The fabrication method and resulting electrodes are characterized in this work using scanning electron microscopy, surface profilometry, and atomic force microscopy. The ability to fabricate submicrometer electrodes on polymer chips in a high-throughput process may allow the mass-production of ultrasensitive biosensors for point-of-care medical devices.
ISSN:1536-125X
1941-0085
DOI:10.1109/TNANO.2007.900507