Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy

In this paper, we present a novel 2-D microelectromechanical systems (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution and long working distance, while also being well suited for miniaturization and integration into endoscopes for in vi...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2007-08, Vol.16 (4), p.969-976
Main Authors: Hyejun Ra, Piyawattanametha, W., Taguchi, Y.., Daesung Lee, Mandella, M.J., Solgaard, O..
Format: Article
Language:English
Subjects:
2-D microelectromechanical systems (MEMS) scanner
Applied sciences
Biological and medical sciences
Circuit properties
Confocal
Dual-axes confocal microscopy
Electric, optical and optoelectronic circuits
Electronics
electrostatic actuation
Endoscopes
Endoscopy
Exact sciences and technology
High-resolution imaging
Image resolution
Imaging
In vivo
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated optics. Optical fibers and wave guides
Investigative techniques, diagnostic techniques (general aspects)
Mechanical instruments, equipment and techniques
Medical sciences
Microelectromechanical systems
Micromechanical devices
Micromechanical devices and systems
micromirror
Microscopy
Optical and optoelectronic circuits
Optical imaging
Optical scanners
Physics
Scanners
self-alignment
Silicon on insulator technology
vertical comb actuators
Wafer bonding
Wafers
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Description
Summary:In this paper, we present a novel 2-D microelectromechanical systems (MEMS) scanner that enables dual-axes confocal microscopy. Dual-axes confocal microscopy provides high resolution and long working distance, while also being well suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned vertical electrostatic combdrives. Maximum optical deflections of plusmn4.8deg and plusmn5.5deg are achieved in static mode for the outer and inner axes, respectively. Torsional resonant frequencies are at 500 Hz and 2.9 kHz for the outer and inner axes, respectively. The imaging capability of the MEMS scanner is successfully demonstrated in a breadboard setup. Reflectance images with a field of view of are achieved at 8 frames/s. The transverse resolutions are 3.94 mum and 6.68 mum for the horizontal and vertical dimensions, respectively.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2007.892900