Nano-lithography with atoms

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Bibliographic Details
Published in:Surface science 1999, Vol.433-35, p.40-47
Main Authors: BELL, A. S, BREZGER, B, DRODOFSKY, U, NOWAK, S, PFAU, T, STUHLER, J, SCHULZE, T, MLYNEK, J
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Metals. Metallurgy
Physics
Surface cleaning, etching, patterning
Surface treatments
Online Access:Get full text
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ISSN:0039-6028
1879-2758